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Surface Measurement System

 P-6 stylus profiler  P-6
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Product De ion

The P-7 stylus profiler offers industry leading measurement repeatability for reliable measurement performance. The surface measurement system has 150 mm scan length standard - the only stylus profiler on the market to offer long scan capability without the need for stitching. The UltraLite? sensor includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a surface measurement system. Finally, this stylus profiler s surface measurement system includes point-and-click operation and the productivity package to offer the easiest to use tool on the market with the features required by university, R&D, and production environments.

Application

The P-7 Stylus profiler surface measurement system is capable of addressing a wide range of surface measurements and applications:

  • Thin film step height measurements
  • Thick film step height measurements
  • Photo resist / soft films
  • Etched trench depth
  • Materials acterization for surface roughness and waviness
  • Surface curvature and form
  • 2D stress of thin films
  • Dimensional analysis and surface texture
  • 3D imaging of various surfaces
  • Flatness or curvature
  • Defect review and defect analysis
  • And many more

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