AFM SNOM/Nano IR,High precision field strength characterization based on AFM
Comprehensive characterization of sub nano morphology, electrical and mechanical properties
Micro nano indentation, scratch friction and wear test, high temperature nano indentation test
Step height test, 2D stress test, 3D mapping
In-SEM In situ,Comprehensive characterization of sub nano morphology, electrical and mechanical properties
Probe Station,I-V,C-V,DC,RF,Microwave test
Micro nano indentation, scratch friction and wear test