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Zeta-20 Optical Profiler
Brand ：KLA
Model ：Zeta-20
Keywords ：Optical profiler, confocal microscopy, surface profiler, white light interferometry.
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The Zeta-20 optical profiler is a non-contact, 3D surface topography measurement system. The system is powered by patented ZDot™ technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters.


The Zeta-20 integrates six different optical metrology technologies in one configurable and easy-to-use system. ZDot™ measurement mode simultaneously collects a high-resolution 3D scan and a True Color infinite focus image. Other 3D measurement techniques include white light interferometry, Nomarski interference contrast microscopy, and shearing interferometry. Film thickness can be measured with ZDot or an integrated broadband reflectometer. The Zeta-20 is also a high-end microscope that can be used for sample review or automated defect inspection. The Zeta-20 supports both R&D and production environments by providing comprehensive step height, roughness, and film thickness measurements, and defect inspection capability.