As an FA engineer, you’re expected to deliver results. There’s no room for error in the data provided by your instruments. Park NX20, with its reputation as the world’s most accurate large sample AFM, is rated so highly in the semiconductor and hard disk industry for its data accuracy.
Accurate AFM Solutions for FA and Research Laboratories
Sidewall measurements for 3D structure study
The NX20’s innovative architecture lets you detect the sidewall and surface of the sample, and measure their angle. This gives the unit the versatility you need to do more innovative research and gain deeper insights.
Surface roughness measurements for media and substrates
Read More related application
High resolution electrical scan mode
Features
1）2D Flexure-Guided Scanner with 100um*100um scan range
2) High Speed Z Scanner with 15um Scan range
3) Low Noise XYZ Position Sensors
4) Motorized XY Sample Stage with optional encoders
5) Step Scan Automation
6) Accessible Sample holder
7) Expansion Slot for Advanced SPM Modes and Options
8) Direct On-Axis High Powered Optics with Intergrated LED illumination
9) Auto Engage by Slide-to-Connect SLD Head
10) Vertically Aligned Motorized Z Stage and Focus Stage
11) High Speed 24-bit Digital Electronics
Park NX20 Specification
XY Scanner
Single-module flexure XY scanner with closed-loop control
Scan range : 100μm x 100μm
50μm x 50μm
25μm x 25μm
20-bit position control and 24-bit position sensor
Stage
XY travel range : 150 mm (200 mm optional)
Z travel range : 25 mm
Focus travel range: 15 mm
Precision encoder for all axes (optional)
Z Scanner
Guided high-force Z scanner
Scan range : 15 µm
30 µm
20-bit position control and 24-bit position sensor
Sample Mount
Up to 150 mm (200 mm optional)
Vacuum grooves to hold wafer samples
Vision
Objective lens
10× (0.21 NA) objective lens with ultra-long working distance
20× (0.42 NA) objective lens with long working distance and high resolution
Direct on-axis vision of sample surface and cantilever
Coupled with 10× objective lens (20× optional)
Field-of-view: 840 µm × 630 µm
CCD: 5 MP
Software
SmartScan™
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)
XEI
AFM data analysis software
Electronics
Signal processing
ADC : 18 channels
4 high-speed ADC channels
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 12 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z scanner positioning
Maximum data size : 4096 x 4096 pixels
Integrated functions
3 channels of flexible digital lock-in amplifier
Digital Q control
External signal access
20 embedded signal input/output ports
5 TTL
outputs : EOF, EOL, EOP,Modulationand AC bias
AFM Mode
(*Optionally available)
Standard Imaging
True Non-Contact Mode
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Intermittent (tapping) AFM
Electrical Characterization*
Scanning Capacitance Microscopy (SCM)
Conductive AFM
Electric Force Microscopy (EFM)
Piezoresponse Force Microscopy (PFM)
Kelvin Probe Microscopy (KPFM)
Options
Customize your AFM to handle any project
Automatic data collection and analysis lets you save time
The NX20 features Park's automation control software that automatically carries out AFM measurements of a sample according to your preset procedure (recipe). It can accurately collect data, perform pattern recognition, and do analysis using its onboard Cognex board and optics module, and export with almost no user in put so you have more time to do innovative research.
Sample Tilting Stage for Sidewall Imaging lets you see more
The NX20’s innovative architecture lets you detect the sidewall and surface of the sample, and measure their angle. This gives the unit the versatility you need to do more innovative research and gain deeper insights.
Innovative control design allows Park NX20 to quickly reach temperature equilibrium
Innovative control design allows Park NX20 to quickly reach temperature equilibrium
Park NX20 also features active vibration isolation.
Encoders for Motorized Stage
• The encoded XY stage travels in 1 µm resolution with 2 µm repeatability
• The encoded Z stage travels in 0.1 µm resolution with 1 µm repeatability
Sample Plates
• Dedicated small sample holder for electrical measurements
• Vacuum grooves to hold wafers
• Sample dimension: Up to 200 mm (150 mm default)
Cliptype Chip Carrier
• Can be used with an unmounted cantilever
• Tip bias function available for Conductive AFM and EFM
• Tip bias range: -10 V ~ +10 V
Precise Temperature Control
• Heating & Cooling Stage (0~180 ºC)
• 250 ºC Heating Stage
• 600 ºC Heating Stage
