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XE-15 Atomic Force Microscopy
Brand ：Park
Model ：XE-15
Keywords ：XE15,Stepscan,AFM,SPM,large Sample
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The Park XE15 includes many unique capabilities that make it ideal for shared labs that handle a diverse range of samples, researchers doing multi variant experiments, and failure analysis engineers working on wafers. Its reasonable price and robust feature set also make it one of the best value large-sample AFMs in the industry.



 

Park XE15 MultiSample™ scan system

1) Automated imaging of multiple samples in one pass

2) Speciallydesigned multi-sample chuck for the loading of up to 16

individual samples


  • 3) Fully motorized XY sample stage travels up to 150 mm x 150 mm
  • Using the motorized sample stage, MultiSample Scan™ enables
  • programmable multiple region imaging in step-and-scan automation.

    • Here’s how it works: 
      1. Register multiple scan positions defined by a user 
      2. Image from the first scan position 
      3. Lift a cantilever 
      4. Move the motorized stage to the next user defined coordinate 
      5. Approach 
      6. Repeat scan

    • 1）2D Flexure-Guided Scanner with 100um*100um scan range

      2)  Flexure-Guided high force Z Scanner

      3)  Motorized XY Sample Stage with Optional Encoders

      4)  High Resolution Digital CCD Camera with Digital Zoom

      5)  Vertically aligned motorized Z stage and Focus Stage 

      6)  Slide-to Connect SLD Head

      7)  Multisample Chuck



   

 

Park XE15 Specifications

 

XY Scanner

Single-module flexure XY scanner with closed-loop control
Scan range : 100 µm × 100 µm

 

Motorized Stage

XY travel range : 150 mm × 150 mm, motorized 
Z travel range : 25 mm
Focus travel range : 20 mm, motorized
                                     Optional precision encoders for repeatable XY positioning

 

Z Scanner

Guided high-force Z scanner
Scan range : 12 µm 
                       25 µm (optional)

 

Sample Mount

Sample size : Up to 150 mm
Thickness : Up to 20 mm

 

Vision

Direct on-axis vision of sample surface and cantilever
Coupled with 10× objective lens (20× optional)
Field-of-view : 480 × 360 µm
CCD : 1 Mpixel

 

Software

XEP

Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)

 

XEI

AFM data analysis software (running on Windows, MacOS X, and Linux)

 

Electronics

High performance DSP : 600 MHz with 4800 MIPS
Maximum 16 data images
Maximum data size : 4096 × 4096 pixels
Signal inputs : 20 channels of 16 bit ADC at 500 kHz samplings
Signal outputs : 21 channels of 16 bit DAC at 500 kHz settling
Synchronous signal : End-of-image, end-of-line, and end-of-pixel TTL signals
Active Q control (optional)
Cantilever spring constant calibration (optional)
CE Compliant
Power : 120 W
Signal Access Module (Optional)

 

AFM Modes
(*Optionally available)

Standard Imaging

True Non-Contact AFM
Basic Contact AFM
Lateral Force Microscopy(LFM)
Phase Imaging
Intermittent (tapping) AFM

 

Force Measurement*

Force Distance (FD) Spectroscopy
Force Volume Imaging

Dielectric/Piezoelectric Properties*

Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoelectric Force Microscopy (PFM)
PFM with High Voltage

 

Mechanical Properties*

Force Modulation Microscopy (FMM) 
Nanoindentation
Nanolithography
Nanolithography with High Voltage
Nanomanipulation 
Piezoelectric Force Microscopy (PFM)

Magnetic Properties*

Magnetic Force Microscopy (MFM)

 
 

Electrical Properties*

Conductive AFM
IV Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
KPFM with High Voltage
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Time-Resolved Photo Current Mapping (PCM)

 

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)

 

AFM Options

 

Active Temperature-controlled Acoustic Enclosure

Innovative control brings the system quickly to its temperature equilibrium
Temperature stability of less than 0.05 ºC within10 minutes of closing AE door
Includes an active vibration isolation system

 

Encoders for Motorized Stage

The encoded XY stage travels in 1 µm resolution with 2 µm repeatability
The encoded Z stage travels in 0.1 µm resolution with 1 µm repeatability

Sample Plates

Vacuum grooves to hold wafers
Sample dimension : Up to 150 mm 

 

25 µm Z-scanner Head

Z scan range : 25 µm
Resonant frequency : 1.7 kHz
Laser type : LD (650 nm) or SLD (830 nm)
Noise floor : 0.03 nm (typical), 0.05 nm (maximum)

XE Optical Head

Optical access : top and side
Z scan range : 12 µm or 25 µm
Laser type : LD (650 µm) or SLD (830 µm)
Noise floor : 0.03 nm (typical), 0.05 nm (maximum)
Resonant frequency : 3 kHz (12 µm XE Head), 1.7 kHz (25 µm XE Head)

 

Clip-type Probehand

Unmounted cantilever can be used
Tip bias range : -10 V to + 10 V
Tip bias function available for EFM and Conductive AFM
Support all the standard and advanced modes but STM, SCM, and in-liquid imaging

Signal Access Module (SAM)

Enables access to various input/output signals for AFM
Scanner driving signal for the XY and Z scanners
Position signal for the XY and Z scanners
Cantilever deflection signals of the vertical/lateral direction
Bias signal for the sample and the cantilever
Driving signal for XE15
Auxiliary input signal to the system

 

Accessories

Electrochemistry Cell
Universal Liquid Cell with Temperature Control
Sample Stages with Temperature Control
Magnetic Field Generator