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Alpha-Step® D-300
Brand ：KLA
Model ：D300
Keywords ：Profilers
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    The Alpha-Step D-300 offers high-resolution 2D profiling, 2D stress, profile stitching and many more features in an easy-to-use platform with the best price-to-performance available in the market. The D-300 system includes an innovative optical lever sensor technology that provides 1000 μm vertical range, sub-Angstrom resolution plus low force, 0.5 to 15 mg. The ability to measure a wide range of applications, from nanometer to millimeter steps, high-resolution roughness, soft materials and thin film stress enable the D-300 to serve various industries in research and development as well as production measurements. The D-300 includes a 140 mm manual stage. The system includes advanced optics, a high-resolution 5 MP camera with a 4x digital zoom and enhanced video controls for highly versatile sample visualization.


Applications


The D-300 is capable of addressing a wide range of measurements and applications:
• Precision step height
• Surface form, bow
• Surface texture
• Material characterizations
• Thin film stress



FEATURES
The D-300 stylus profilers provide a wide range of application specific

capabilities, meeting the needs of the research, engineering, and production communities.


Stylus Profiling
The 140 mm sample stage supports scan lengths up to 30 mm in a single scan and up to 80 mm utilizing the stitching function. The D-300 provides 1000 μm and low-force sensor technology at 0.5 mg, ensuring scan precision on an array of applications, including thin films, soft materials, tall steps, bow and stress.

Step Height Repeatability
A sub-Angstrom resolution, optical lever sensor translates into the most repeatable low-mass, low-noise sensor design. This enables step height repeatability of 5 Å on a 1 μm step for
demanding process needs.
    


2D Stress (optional)
2D stress utilizes Stoney’s Equation and changes in sample bow, before and after processing, to calculate thin film stress.