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The nGauge Atomic Force Microscope
Brand ：ICSPI
Model ：nGauge
Keywords ：Atomic focus,AFM,Roughness,Step-height,morphology
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Introducing the world’s first Single-Chip Dynamic Atomic Force Microscope: smaller, faster, better.

ICSPI (pronounced: icy-spy) has integrated all of the mechatronic systems that are used in conventional AFM’s onto a single CMOS chip. The result is the nGauge system, an AFM that has been volumetrically scaled by a factor of 1 million.

   We produce versatile instruments with superior vibration immunity, less drift, and an extremely low price point when compared to the state-of-the-art.



Key features:


•  Our integrated thermal piezoresistive resonant cantilevers make it possible to exchange tips and  start imaging in less than a minute (no lasers to align)

•  Thermal proximity sensors allow for a completely automated approach in seconds

•  Electrothermal MEMS actuators precisely move the cantilever tip with low drift, enabling long-term imaging experiments

•  The small size of the nGauge AFM rejects building vibrations, so our system images robustly on any         table top

•  An aluminum oxide tip images consistently without noticeable tip wear for over 10,000 images

•  Costs 100x less than many high-end AFMs, with no compromise in quality

•  Intuitive, cross-platform software designed with the most novice user in mind, with advanced features

readily accessible


Maximum Scan Range(XYZ)

20*20*10um

Scan Speed

>8 lines/Second

XYZ Actuation

Electrothermal

Feedback Controller

PID

Sensor

Piezoresistive

System Dimensions

70mm*90mm*75mm

Dynamic RMS noise

<1nm

Stage Area

70mm*43mm

Resonant Frequency of Cantilever

8-9kHz

Z Stage Travel

20mm

Tip Radius

<80nm

Force Curve

Dynamic

Imaging Mode

Intermittent Contact

OS requirements

Windows,OSX










Customer（China）

  • Nanjing University
  • Tongji University
  • IMEC
  • CASHIPS
  • Fudan University
  • Donghua University
  • Tianjin University


Reference：


  1. N. Sarkar and R. Mansour, “CMOS-MEMS atomic force microscope,”  Transducers 2015
  2. D. Strathearn, G. Lee, N. Sarkar, M. Olfat and R. R. Mansour, "A distortion-free single-  chip atomic force microscope with 2DOF isothermal scanning," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, 2015, pp. 2113- 2116.
  3. N. Sarkar, D. Strathearn, G. Lee, M. Olfat, and R. R. Mansour, “A 0.25MM3 ATOMIC FORCE MICROSCOPE ON-A-CHIP,” MEMS 2015, pp. 732–735, 2015.