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Manual Probe Station TS150/TS200/TS300
Brand ：MPI
Model ：TS150/TS200/TS300
Keywords ：Manual Probe Station,TS150,TS200,TS300
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150 mm/200 mm/300 mm Manual Probe System
For accurate and reliable DC/CV, RF and High Power measurements

FEATURES:

Universal Use
• Designed for wide variety of applications such as Device Characterization

and Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering,

MEMS and High Power


Ergonomic Design
• Unique puck controlled air bearing stage for quick single-handed operation
• Rigid platen accommodates up to 10 DC or 4 RF positioners
• Highly repeatable platen lift design with three discrete positions for contact, separation, and loading


Upgradability
• Available with various chuck options and wide range of accessories such as DC/RF/mmW Micro-Positioners, Optics, microscopes and EMI shielded

dark box to support various application requirements

Air-bearing stage

The MPI unique air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25x25mm XY-Theta micrometer movement.

Unique platen lift with Probe Hover Control™

Measurement accuracy depends on the contact quality first! The highly repeatable (1µm) platen lift design with three discrete positions for contact, separation (300µm), and loading (3mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI….

Height adjustment scale

The probe platen has 25 mm of fine height adjustment required to support various applications. The unique 1mm accurate scale gives direct feedback about the current position.

Compact and rigid platen design

The compact and rigid platen design accommodates up to ten DC or four RF MicroPositioners for various application requirements.


Various chuck options

The manual systems are available with various chuck options to meet different budgets and application requirements. Chuck options include MPI’s coaxial or triaxial Chucks or various ERS thermal chucks…

Auxiliary chucks

The RF chucks include two auxiliary chucks built in ceramic material for accurate RF calibration.


Various optic and movement choices

A wide range of Optics and movements are available with a choice between stereo for common DC/CV applications or a single tube MPI SZ10 or MZ12 for RF configurations. Even high power optics, like Mitutoyo FS70 or Motic PSM-1000 are available for Failure Analysis application.

Optic tilting

90 degree tilting as a standard feature or even pneumatically driven, linear Z lift offers very convenient set-up and easy probe tips replacement.

MPI TS150, TS200 & TS300 are open, easy to use and cost effective manual probe systems designed for precision analysis of substrates and wafers up to 150, 200 and 300mm. These systems address a wide variety of applications such as Failure Analysis, Design Validation/IC Engineering, Wafer Level Reliability, MEMS, High Power and Device Characterization and Modeling.