The InSEM ® HT (high
temperature) measures hardness, modulus and stiffness at high temperature by
independently heating both the tip and sample in a vacuum environment. The
InSEM ® HT is compatible with scanning electron microscope (SEM) and focused
ion beam (FIB) chambers, or standalone vacuum chambers. The accompanying InView
software helps advanced researchers develop novel experiments. Scientific
publications show that InSEM ® HT results match well to traditional large-scale
high temperature test data. The combination of wide temperature range
capability and low cost of ownership makes the InSEM ® HT a valuable tool in
materials development research programs.
Main Function
Continuous Stiffness
Measurement (CSM)
The CSM technique involves oscillating the probe
during indentation to measure properties as a function of depth, force, time,
or frequency. The option comes with a constant strain rate experiment that
measures hardness and modulus as a function of depth or load, which is the most
common test method used across academia and industry. CSM is also used for
other advanced options, including the ProbeDMA™ method for storage and loss
modulus measurements and AccuFilm™ substrate-independent measurements. The CSM is
integrated into the InQuest controller and InView software to deliver
unparalleled ease of use and data quality.
NanoBlitz3D
NanoBlitz 3D utilizes the InForce 50 actuator to
generate 3D maps of measurements for high-E (>3GPa) materials with a
Berkovichtip. NanoBlitz performs indents at < 1s per indent, up to 100,000
indents (300x300 array), and will provide Young’s modulus, hardness, and
stiffness at a specified load for each indent in the array. This large number
of tests allows increased statistical accuracy, and includes histogram charts
to show multiple phases or materials. NanoBlitz 3D also provides visualization
software and data handling capabilities
AccuFilm™ Thin Film Method Pack
The AccuFilm™ Thin Film Method Pack is an InView test
method based on the Hay-Crawford model for measuring substrate-independent
material properties using Continuous Stiffness Measurement (CSM). AccuFilm™
corrects for substrate influence on film measurements for hard films on soft
substrates as well as soft films on hard substrates.
ProbeDMA™ Polymer Method Pack
The Polymer Pack enables measurement of the complex
modulus of polymers as a function of frequency. The pack includes a flat-punch
tip, a viscoelastic reference material, and a test method for evaluation of
viscoelastic properties. This measurement technique is key to characterizing
nanoscale polymers and polymer films that are not well-served by traditional
DMA test instruments.
Scratch and Wear Testing
Method Pack
The scratch and wear testing method pack is provided
with the InForce 50 actuator. Scratch testing involves the application of
either a constant or ramped load to an indenter while moving across the sample
surface at a specified velocity. Scratch testing allows characterization of
numerous material systems, such as thin films, brittle ceramics, and polymers.
Gemini 2D Multi-Axis
Transducer
The Gemini 2D multi-axis technology brings the same
performance of standard indentation to a second lateral axis, with the CSM
operating along both axes simultaneously. The additional information provided
by this patented technique helps give new insight to material properties and failure mechanisms. The two-dimensional force
transducer is a unique solution in lateral force and tribology measurements,
and enables measurements of Poisson's ratio, coefficient of friction, scratch,
wear, shear and topology.
DataBurst
DataBurst enables systems equipped with InView
software and the InQuest controller to record displacement data at rates
>1kHzfor measuring high strain step loads, pop-in and other high speed
events. InSEM HT systems outfitted with the User Method Development option can
also modify methods to work with DataBurst.
Technical Features
•Sample heating up to 800 °C
with 10mm sample-size and vacuum-compatible sample mounting system
•InForce 50 actuator for
capacitance displacement measurement and electromagnetic force actuation with
interchangeable tips
•InQuest high-speed
controller electronics with 100kHz data acquisition rate and 20µs time constant
•XYZ motion system for
sample targeting
•SEM video capture for
synchronized SEM images with test data
•Unique software-integrated
tip-calibration system for fast, accurate tip calibration
•InView control and data
review software with Windows ®10 compatibility and method developer for
user-designed experiments.
•Indentation test in
accordance with international standard iso14577
• InSEM HT dynamic test
accessory is developed by the inventor of patent technology of continuous
stiffness: the principle of dynamic mechanical test is to apply a positive
metaphysical wave on the indenter in the process of quasi-static loading, so as
to characterize the change of material mechanical properties with the change of
indentation depth, load, time or frequency.
Nanoblitz 3D technology provides the young's
modulus, hardness and stiffness of each indentation under load. A large number
of tests improve the accuracy of statistics, and automatically generate the
young's modulus, hardness and stiffness mapping diagram. It is an important
method to study heterogeneous materials.
Technical capability
InForce50 Load |
| InForce1000 Load |
| High precision nano motor platform |
Maximum load： | 50mN | Maximum load： | 1000mN | Maximum displacement in X direction：20 mm |
load resolution： | 3nN | load resolution： | 6nN | Maximum displacement in Y direction：20 mm |
Maximum movement range of head： | 45um | Maximum movement range of head： | 80um | Maximum displacement in Z direction：25 mm |
Displacement noise background: | <0.01nm | Displacement noise background: | <0.1nm | Encoder X-Y-Z sensor resolution： 4 nm |
Displacement digital resolution： | <0.002nm | Displacement digital resolution： | <0.004nm |
|
Hardness and Modulus Measurements
(Oliver-Pharr)
The InSEM HT nanoindenter measures hardness and modulus
for a wide variety of materials, from
ultra-soft gels to hard coatings. The high throughput assessment of these
properties enables quality control and assurance on production lines.
Continuous Stiffness Measurement (CSM)
Continuous stiffness measurement is used to
quantify dynamic material properties, such as strain rate and frequency-induced
effects. The InSEM HT provides dynamic excitation from 0.1Hz to 1kHz, enabling
time-based monitoring for accurate determination of initial surface contact and
continuous measurement of contact stiffness as a function of depth or
frequency.
High Speed Material Property Maps
For composite materials, the mechanical properties may
vary widely from one area to the next. The optional NanoBlitz Topography and
Tomography software can quickly generate color maps of any of the measured
mechanical properties.
Nano Dynamic Mechanical Analysis (DMA)
Polymers are exceptionally
complex materials. In order to gain useful information for polymer design
decisions, mechanical property measurements should be made on a relevant sample
in a relevant context. Nanoindentation testing makes such context-specific
measurements more accessible because samples can be small and minimally
prepared. The InSEM HT nanoindenter system can also be used to measure complex
modulus and the viscoelastic properties of the polymer by oscillating the
indenter while in contact with the materials.
Quantitative scratch wear test
InSEM HT can perform scratch and wear tests on a variety
of materials. Coatings and films go through many processes, such as chemical
and mechanical polishing (CMP) and wire bonding, to test the strength of these
films and their adhesion on the substrate. It is very important for these
materials to resist plastic deformation and remain intact without blistering
during these processes.
High temperature test
In many industrial fields,
material research not only focuses on the performance of mechanical stress at
room temperature, but also on the performance under thermal stress. InSEM HT is
designed for the next generation of material testing in advanced technology
applications such as aerospace, automotive and military / defense.
Materials undergo deformation due to applied load as well as elevated
temperatures. Creep is the measurement of strain overtime as a result of
combined mechanical and thermal stressors, and creep behavior is critical for
effective design of automotive and aerospace systems. The InSEM HT allows
temperature elevation up to 800 °C, while simultaneously monitoring material
strain.
Strain Rate Sensitivity
Strain rate sensitivity enables the quantification of strain as a function of various loading conditions. For example, applying mechanical and/or thermal stress to a material over a short period of time may yield different strain results than if the sample was subjected to the stresses more slowly. The InSEM HT allows customization of user experiments to measure the strain sensitivity as a function of loading conditions up to 800 °C.
Related literature
1. Strain Rate Sensitivity of Thin Metal
Films by Instrumented Indentation
2.
Effect of Annealing on 50nm Gold Films
